JPH0241862Y2 - - Google Patents

Info

Publication number
JPH0241862Y2
JPH0241862Y2 JP1986129917U JP12991786U JPH0241862Y2 JP H0241862 Y2 JPH0241862 Y2 JP H0241862Y2 JP 1986129917 U JP1986129917 U JP 1986129917U JP 12991786 U JP12991786 U JP 12991786U JP H0241862 Y2 JPH0241862 Y2 JP H0241862Y2
Authority
JP
Japan
Prior art keywords
light
substrate
mask
alignment mark
alignment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1986129917U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6336034U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986129917U priority Critical patent/JPH0241862Y2/ja
Publication of JPS6336034U publication Critical patent/JPS6336034U/ja
Application granted granted Critical
Publication of JPH0241862Y2 publication Critical patent/JPH0241862Y2/ja
Expired legal-status Critical Current

Links

JP1986129917U 1986-08-26 1986-08-26 Expired JPH0241862Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986129917U JPH0241862Y2 (en]) 1986-08-26 1986-08-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986129917U JPH0241862Y2 (en]) 1986-08-26 1986-08-26

Publications (2)

Publication Number Publication Date
JPS6336034U JPS6336034U (en]) 1988-03-08
JPH0241862Y2 true JPH0241862Y2 (en]) 1990-11-08

Family

ID=31026924

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986129917U Expired JPH0241862Y2 (en]) 1986-08-26 1986-08-26

Country Status (1)

Country Link
JP (1) JPH0241862Y2 (en])

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5324206B2 (ja) * 2008-12-18 2013-10-23 日本電信電話株式会社 位置合わせ方法、ホトマスクおよびウエハ
JP5770014B2 (ja) * 2011-05-19 2015-08-26 株式会社ブイ・テクノロジー フォトマスク及び露光装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5011668A (en]) * 1973-06-01 1975-02-06
JPS52144973A (en) * 1976-05-28 1977-12-02 Hitachi Ltd Positioning method of semiconductor wafers
JPS5854408B2 (ja) * 1977-03-03 1983-12-05 富士通株式会社 位置合せ方法
JPS60110119A (ja) * 1983-11-21 1985-06-15 Canon Inc 位置合わせ方法

Also Published As

Publication number Publication date
JPS6336034U (en]) 1988-03-08

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